Patents/Inventors

Shingo Hishiya

YamanashiJP4 patents

5 Patents

US124380552025
Abnormality Detection Method and Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123343802025
Boat Transfer Method and Heat Treatment Apparatus
Tokyo Electron Limited
0 cites
US120183662024
Substrate Processing Apparatus and Cleaning Method
Tokyo Electron Limited
0 cites
US117869462023
Cleaning Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117252812023
Gas Introduction Structure, Thermal Processing Apparatus and Gas Supply Method
TOKYO ELECTRON LIMITED
0 cites