Patents/Inventors

Shin-yee Lu

Fremont, CAUS3 patents

3 Patents

US125884672026
Optical Sensors for Measuring Properties of Consumable Parts in a Semiconductor Plasma Processing Chamber
Tokyo Electron Limited
0 cites
US119898762024
Method and Apparatus for Inspecting Pattern Collapse Defects
Tokyo Electron Limited
0 cites
US116762662023
Method and Apparatus for Inspecting Pattern Collapse Defects
Tokyo Electron Limited
0 cites