Patents/Inventors

Shin Yamaguchi

MiyagiJP10 patents

11 Patents

US124446352025
Substrate Support and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123290342025
Audio Device and Driving Method Thereof, and Display Device
Sony Group Corporation
0 cites
US122939032025
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US122725282025
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122179432025
Substrate Processing Apparatus and Electrostatic Chuck
TOKYO ELECTRON LIMITED
0 cites
US121658962024
Substrate Support and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US120681432024
Temperature Adjustment Method
TOKYO ELECTRON LIMITED
0 cites
US119357292024
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US119086662024
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118697992024
Temperature Adjustment System
TOKYO ELECTRON LIMITED
0 cites
US117911392023
Substrate Support
Tokyo Electron Limited
0 cites