Patents/Inventors

Shin-ya Nakafuji

TokyoJP1 patent

2 Patents

US122653332025
Composition, Resist Underlayer Film, Method of Forming Resist Underlayer Film, Method of Producing Patterned Substrate, and Compound
JSR CORPORATION
0 cites
US118801382024
Composition, Pattern-forming Method, and Compound-producing Method
JSR CORPORATION
0 cites