Patents/Inventors

Shin Matsuura

MiyagiJP9 patents

9 Patents

US125312132026
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124697382025
Substrate Support, Plasma Processing Apparatus, and Ring Replacement Method
TOKYO ELECTRON LIMITED
0 cites
US123946052025
Plasma Processing System and Edge Ring Replacement Method
TOKYO ELECTRON LIMITED
0 cites
US123745332025
Plasma Processing System and Method of Mounting Annular Member
TOKYO ELECTRON LIMITED
0 cites
US121658542024
Substrate Support and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121658932024
Substrate Processing System and Transfer Method
Tokyo Electron Limited
0 cites
US120681392024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120273462024
Substrate Processing Apparatus and Method of Driving Relay Member
TOKYO ELECTRON LIMITED
0 cites
US119011632024
Plasma Processing System and Edge Ring Replacement Method
TOKYO ELECTRON LIMITED
0 cites