Patents/Inventors

Shin Hiyama

ToyamaJP2 patents

2 Patents

US125059892025
Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US119487782024
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Baffle Structure of the Substrate Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites