Patents/Inventors

Shin Hirotsu

MiyagiJP3 patents

4 Patents

US124379702025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US118307042023
Plasma Processing Apparatus and Control Method
TOKYO ELECTRON LIMITED
0 cites
US117640342023
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US115747982023
Plasma Processing Apparatus and Control Method
TOKYO ELECTRON LIMITED
0 cites