Patents/Inventors

Shih-ming Chang

HsinchuTW43 patents

42 Patents

US125608702026
Proximity Effect Correction in Electron Beam Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125435572026
System and Method to Reduce Layout Dimensions Using Non-perpendicular Process Scheme
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125387602026
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124943662025
Method of Manufacturing Semiconductor Devices and Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124761452025
Self-aligned Cut-metal Layer Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124380002025
Methods for Integrated Circuit Design and Fabrication
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124168642025
Tool Mismatch Reduction Using Aberration Map of the Tools
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124061302025
Geometric Mask Rule Check with Favorable and Unfavorable Zones
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123994312025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123931142025
Semiconductor Apparatus and Method of Operating the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123604602025
System and Method for Selecting Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123411032025
Integrated Circuit and Method of Manufacturing Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123210992025
Method for Generating EUV Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123158152025
Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122986732025
Method of Manufacturing Photo Masks
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122653342025
Optical Proximity Correction and Photomasks
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122437412025
Semiconductor Structure and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US122242372025
Method of Manufacturing a via and a Metal Wiring for a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122242412025
Semiconductor Device and Manufacturing Method Thereof Including a Conductive-material Etching Process to Further Adjust a via Shape
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121911552025
Semiconductor Structures and Method for Manufacturing the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US121258502024
Buried Metal Track and Methods Forming Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120946912024
Etch Apparatus for Compensating Shifted Overlayers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120858672024
Lithography Process Monitoring Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120625432024
Line-end Extension Method and Device
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120386932024
Method of Manufacturing Photo Masks
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120199742024
Geometric Mask Rule Check with Favorable and Unfavorable Zones
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120209842024
Methods for Forming Self-aligned Interconnect Structures
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US119948052024
Method of Operating Semiconductor Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US119292582024
Via Connection to a Partially Filled Trench
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118993672024
Dummy Insertion for Improving Throughput of Electron Beam Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd
0 cites
US118993732024
Proximity Effect Correction in Electron Beam Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118548072023
Line-end Extension Method and Device
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118548202023
Spacer Etching Process for Integrated Circuit Design
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118482082023
Method for Forming Semiconductor Device Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd
0 cites
US117893702023
Optical Proximity Correction and Photomasks
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117823522023
Lithography Process Monitoring Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117149512023
Geometric Mask Rule Check with Favorable and Unfavorable Zones
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116870062023
Method of Manufacturing Photo Masks
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115861152023
Method of Operating Semiconductor Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US115720872023
Radar Monitoring System for Traffic Control and Method Thereof
CUBTEK Inc.
0 cites
US115560582023
Proximity Effect Correction in Electron Beam Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US115437532023
Tunable Illuminator for Lithography Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites