6 Patents
- US123622332025Methods of Performing Chemical-mechanical Polishing Process in Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US123426002025Titanium-containing Diffusion Barrier for CMP Removal Rate Enhancement and Contamination Reduction
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122058862025Hybrid Method for Forming Semiconductor Interconnect Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US118108162023Chemical Mechanical Polishing Topography Reset and Control on Interconnect Metal Lines
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US117422392023Methods of Performing Chemical-mechanical Polishing Process in Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US115453892023Titanium-containing Diffusion Barrier for CMP Removal Rate Enhancement and Contamination Reduction
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites