Patents/Inventors

Shih-chang Shih

HsinchuTW6 patents

6 Patents

US125357272026
EUV Lithography Mask with a Porous Reflective Multilayer Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122769232025
Exhaust System with U-shaped Pipes
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US119948092024
Exhaust System with U-shaped Pipes
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118090752023
EUV Lithography Mask with a Porous Reflective Multilayer Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116812322023
Exhaust System with U-shaped Pipes
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116574922023
Reticle Backside Inspection Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites