Shigeru Tahara

4 Patents

• US122495152025

  Etching Method and Etching Apparatus

  UNIVERSITE D'ORLEANS

  0 cites
• US121319142024

  Selective Etching with Fluorine, Oxygen and Noble Gas Containing Plasmas

  Université D'orleans

  0 cites
• US120681712024

  Method for Etching Oxide Semiconductor Film and Plasma Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US116161942023

  Etching Method

  TOKYO ELECTRON LIMITED

  0 cites