Patents/Inventors

Shigeru Shirayone

TokyoJP2 patents

3 Patents

US121911212025
Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US121129252024
Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US116642332023
Method for Releasing Sample and Plasma Processing Apparatus Using Same
HITACHI HIGH-TECH CORPORATION
0 cites