Patents/Inventors

Shigeru Nakamoto

TokyoJP9 patents

9 Patents

US125736012026
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US123810712025
Plasma Processing Method and Plasma Processing Apparatus
Hitachi High-tech Corporation
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US123680312025
Plasma Processing Method
Hitachi High-tech Corporation
0 cites
US121319642024
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
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US120625302024
Vacuum Processing Apparatus and Vacuum Processing Method
HITACHI HIGH-TECH CORPORATION
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US120515742024
Wafer Processing Method and Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
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US118759782024
Plasma Processing Apparatus and Plasma Processing Method
Hitachi High-tech Corporation
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US116055302023
Plasma Processing Apparatus, Data Processing Apparatus and Data Processing Method
HITACHI HIGH-TECH CORPORATION
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US115691352023
Plasma Processing Method and Wavelength Selection Method Used in Plasma Processing
HITACHI HIGH-TECH CORPORATION
0 cites