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Inventors
Shigeru Ishizawa
Miyagi
JP
3 patents
3 Patents
US12567568
2026
Focus Ring Replacement Method and Plasma Processing System
TOKYO ELECTRON LIMITED
0 cites
US12094696
2024
Focus Ring Replacement Method and Plasma Processing System
TOKYO ELECTRON LIMITED
0 cites
US11990323
2024
Focus Ring Replacement Method and Plasma Processing System
TOKYO ELECTRON LIMITED
0 cites