Patents/Inventors

Shigenobu Sakita

OsakaJP2 patents

3 Patents

US120637212024
Heater
SUMITOMO ELECTRIC INDUSTRIES, Ltd.
0 cites
US120338802024
Wafer Holding Body
SUMITOMO ELECTRIC INDUSTRIES, Ltd.
0 cites
US117323592023
Wafer Holder
Sumitomo Electric Industries, Ltd.
0 cites