Patents/Inventors

Shigemi Oono

KoshiJP1 patent

2 Patents

US122437582025
Monitoring System for a Sealing Apparatus Having a Substrate Treatment Apparatus in a Housing Utilizing a Laser Sensor Installed in a Space Between the Housing and the Substrate Treatment Apparatus and That Scans a Detection Region Therein
Tokyo Electron Limited
0 cites
US119454462024
Control Device
Hitachi Astemo, Ltd.
0 cites