Patents/Inventors

Shibing Liu

San Jose, CAUS3 patents

4 Patents

US123680672025
Method, Apparatus, and System for Dynamically Controlling an Electrostatic Chuck During an Inspection of Wafer
ASML Netherlands B.V.
0 cites
US120515622024
Method, Apparatus, and System for Wafer Grounding
ASML Netherlands B.V.
0 cites
US120280002024
Object Table Comprising an Electrostatic Clamp
ASML Netherlands B.V.
0 cites
US116375122023
Object Table Comprising an Electrostatic Clamp
ASML Netherlands B.V.
0 cites