Patents/Inventors

Shian Wei Mao

TaipeiTW3 patents

4 Patents

US123946692025
Wet Cleaning with Tunable Metal Recess for via Plugs
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120209812024
Conductive Feature Formation and Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117988432023
Conductive Feature Formation and Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US115575122023
Wet Cleaning with Tunable Metal Recess for via Plugs
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites