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Inventors
Shi Hyun Park
Pyeongtaek-si
KR
9 patents
2 Patents
US12601409
2026
Gas Exhaust Apparatus and Intake Line Automatic Closing Apparatus Used for Gas Exhaust Apparatus
SEMES CO., Ltd.
0 cites
US12138667
2024
Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites