Patents/Inventors

Shi-han Shann

HsinchuTW1 patent

2 Patents

US123325712025
Target Control in Extreme Ultraviolet Lithography Systems Using Aberration of Reflection Image
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118605442024
Target Control in Extreme Ultraviolet Lithography Systems Using Aberration of Reflection Image
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites