Patents/Inventors

Shengnan Yu

TokyoJP2 patents

3 Patents

US122116742025
Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US120149082024
Vacuum Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US117767922023
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites