Patents/Inventors

Sheng-min Wang

New TaipeiTW3 patents

4 Patents

US124168642025
Tool Mismatch Reduction Using Aberration Map of the Tools
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123862512025
Method and System to Introduce Bright Field Imaging at Stitching Area of High-na EUV Exposure
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123210992025
Method for Generating EUV Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121892842025
Method for Forming Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites