Patents/Inventors

Sheng-ching Kao

HsinchuTW2 patents

3 Patents

US123263972025
In-situ Apparatus for Detecting Abnormality in Process Tube
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US121192732024
System and Method for High Speed Inspection of Semiconductor Substrates
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117495712023
System and Method for High Speed Inspection of Semiconductor Substrates
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites