Patents/Inventors

Shena Jia

ShanghaiCN5 patents

5 Patents

US125448072026
Wafer Cleaning Apparatus
ACM RESEARCH (SHANGHAI), Inc.
0 cites
US124826972025
Substrate Supporting Apparatus
ACM RESEARCH (SHANGHAI), Inc.
0 cites
US123343672025
Method and Apparatus for Removing Particles or Photoresist on Substrates
ACM RESEARCH (SHANGHAI), Inc.
0 cites
US121866842025
Method and Apparatus for Cleaning Substrates Using High Temperature Chemicals and Ultrasonic Device
ACM RESEARCH (SHANGHAI), Inc.
0 cites
US119258812024
Method and Apparatus for Cleaning Substrates Using High Temperature Chemicals and Ultrasonic Device
ACM RESEARCH (SHANGHAI) Inc.
0 cites