Patents/Inventors

Shekhar Athani

BangaloreIN3 patents

3 Patents

US125663812026
Chamber and Methods of Cooling a Substrate After Baking
Applied Materials, Inc.
0 cites
US123226332025
Electrostatic Chuck with Improved Temperature Control
Applied Materials, Inc.
0 cites
US121129722024
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor Process Chamber
APPLIED MATERIALS, Inc.
0 cites