Patents/Inventors

Shawn D. Eggum

Lonsdale, MNUS5 patents

6 Patents

US123157492025
Methods of Installing a Purge Fluid Conditioning Element Into a Semiconductor Substrate Carrying Container
ENTEGRIS, Inc.
0 cites
US121408602024
Reticle Pod with Window
ENTEGRIS, Inc.
0 cites
US120625602024
Reticle Pod Having Side Containment of Reticle
ENTEGRIS, Inc.
0 cites
US119142872024
Container for Holding and Transporting Reticles Having a Transparent Window Assembly
ENTEGRIS, Inc.
0 cites
US115944372023
Reticle Pod Having Side Containment of Reticle
ENTEGRIS, Inc.
0 cites
US115519572023
Purge Connectors and Modules for a Substrate Container
ENTEGRIS, Inc.
0 cites