Patents/Inventors

Shawming Ma

Sunnyvale, CAUS9 patents

9 Patents

US125623422026
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
Mattson Technology, Inc.
0 cites
US123476772025
Enhanced Ignition in Inductively Coupled Plasmas for Workpiece Processing
Mattson Technology, Inc.
0 cites
US121597892024
Atomic Layer Etch Process Using Plasma in Conjunction with a Rapid Thermal Activation Process
Mattson Technology, Inc.
0 cites
US121192162024
Arc Lamp with Forming Gas for Thermal Processing Systems
Mattson Technology, Inc.
0 cites
US120026522024
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites
US118482042023
Enhanced Ignition in Inductively Coupled Plasmas for Workpiece Processing
Mattson Technology, Inc.
0 cites
US117911812023
Methods for the Treatment of Workpieces
MATTSON TECHNOLOGY, Inc.
0 cites
US117640722023
Method for Processing a Workpiece Using a Multi-cycle Thermal Treatment Process
Mattson Technology, Inc.
0 cites
US117215392023
Arc Lamp with Forming Gas for Thermal Processing Systems
MATTSON TECHNOLOGY, Inc
0 cites