Patents/Inventors

Shardul S. Patel

Chelmsford, MAUS2 patents

3 Patents

US121547662024
Ion Source Having Different Modes of Operation
Applied Materials, Inc.
0 cites
US120946812024
Hybrid Ion Source for Aluminum Ion Generation Using a Target Holder and a Solid Target
Applied Materials, Inc.
0 cites
US120401542024
Hybrid Ion Source for Aluminum Ion Generation Using Organoaluminium Compounds and a Solid Target
Applied Materials, Inc.
0 cites