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Sharad N. Yedave
Danbury, CT
US
3 patents
3 Patents
US11827973
2023
Germanium Tetraflouride and Hydrogen Mixtures for an Ion Implantation System
ENTEGRIS, Inc.
0 cites
US11682540
2023
Ion Implantation System with Mixture of Arc Chamber Materials
ENTEGRIS, Inc.
0 cites
US11621148
2023
Plasma Immersion Methods for Ion Implantation
ENTEGRIS, Inc.
0 cites