15 Patents
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- US124547522025Method and Apparatus for Forming a Patterned Structure on a Substrate
ASM IP Holding B.V.
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- US122278352025Selective Deposition of Material Comprising Silicon and Oxygen Using Plasma
ASM IP Holding B.V.
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- US119159292024Methods for Selectively Forming a Target Film on a Substrate Comprising a First Dielectric Surface and a Second Metallic Surface
ASM IP Holding B.V.
0 cites - US118982402024Selective Deposition of Silicon Oxide on Dielectric Surfaces Relative to Metal Surfaces
ASM IP Holding B.V.
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