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Inventors
Shao-ming Koh
Hsinchu
TW
1 patent
2 Patents
US12068191
2024
Low-resistance Contact Plugs and Method Forming Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US12009363
2024
Method for Forming Source/drain Contacts
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites