Patents/Inventors

Shao-hua Wang

TaoyuanTW8 patents

8 Patents

US123604642025
Lithography System and Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122102962025
Method of Cleaning Wafer Table of Photolithography System and Method of Manufacturing Integrated Circuit
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121642352024
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120091772024
Detection Using Semiconductor Detector
NATIONAL TSING HUA UNIVERSITY
0 cites
US119538392024
Highly Efficient Automatic Particle Cleaner Method for EUV Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118031292023
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US117823502023
Lithography System and Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116447592023
Droplet Generator and Method of Servicing Extreme Ultraviolet Radiation Source Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites