Patents/Inventors

Shao Hua Chang

TokyoJP13 patents

14 Patents

US122701202025
Plating Apparatus and Plating Method
EBARA CORPORATION
0 cites
US122473112025
Plating Apparatus and Plating Process Method
EBARA CORPORATION
0 cites
US121806062024
Plating Apparatus
EBARA CORPORATION
0 cites
US121523112024
Wetting Method for Substrate and Plating Apparatus
EBARA CORPORATION
0 cites
US121348332024
Plating Apparatus and Cleaning Method of Contact Member of Plating Apparatus
EBARA CORPORATION
0 cites
US121166872024
Powder Supply Apparatus and Plating System
EBARA CORPORATION
0 cites
US120778752024
Air Bubble Removing Method of Plating Apparatus and Plating Apparatus
EBARA CORPORATION
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US120548402024
Plating Apparatus, Pre-wet Process Method, and Cleaning Process Method
EBARA CORPORATION
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US119062992024
Plating Apparatus and Film Thickness Measuring Method for Substrate
EBARA CORPORATION
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US118917152024
Paddle, Processing Apparatus Having the Paddle, and Method of Producing the Paddle
EBARA CORPORATION
0 cites
US118460352023
Plating Apparatus and Plating Method
EBARA CORPORATION
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US117252962023
Plate, Plating Apparatus, and Method of Manufacturing Plate
EBARA CORPORATION
0 cites
US117177962023
Paddle, Plating Apparatus Equipped with the Paddle, and Plating Method
EBARA CORPORATION
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US116036012023
Plating Device and Resistor
EBARA CORPORATION
0 cites