Patents/Inventors

Shao-chi Wei

HsinchuTW4 patents

5 Patents

US124630292025
Cleaning Method, Semiconductor Manufacturing Method and a System Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US122822602025
Method for Cleaning Substrate, Method for Manufacturing Photomask and Method for Cleaning Photomask
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US119143032024
Apparatus and Method for Characterizing a Microlithographic Mask
Carl Zeiss SMT GmbH
0 cites
US117748702023
Method for Removing a Particle from a Mask System
Carl Zeiss SMS Ltd.
0 cites
US116004842023
Cleaning Method, Semiconductor Manufacturing Method and a System Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites