Shanker Kuttath

4 Patents

• US125776382026

  Castable Aluminum Alloys for Wafer Handling Chambers in Semiconductor Processing Systems

  ASM IP Holding B.V.

  0 cites
• US124513862025

  Electrostatic Chuck

  ASM IP Holding B.V.

  0 cites
• US120625652024

  Electrostatic Chuck, Assembly Including the Electrostatic Chuck, and Method of Controlling Temperature of the Electrostatic Chuck

  ASM IP Holding B.V.

  0 cites
• US119963122024

  Electrostatic Chuck

  ASM IP Holding B.V.

  0 cites