Patents/Inventors

Shankar Swaminathan

Phoenix, AZUS17 patents

16 Patents

US124671372025
Semiconductor Processing Device
ASM IP Holding B.V.
0 cites
US123548772025
Vapor Deposition of Films Comprising Molybdenum
ASM IP Holding B.V.
0 cites
US122939112025
Structure Including Siocn Layer and Method of Forming Same
ASM IP Holding B.V.
0 cites
US122610382025
Gapfill of Variable Aspect Ratio Features with a Composite PEALD and PECVD Method
Lam Research Corporation
0 cites
US122154162025
Methods for Depositing a Molybdenum Nitride Film on a Surface of a Substrate by a Cyclical Deposition Process and Related Semiconductor Device Structures Including a Molybdenum Nitride Film
ASM IP Holding B.V.
0 cites
US122031662025
Apparatus and Methods for Performing an In-situ Etch of Reaction Chambers with Fluorine-based Radicals
ASM IP Holding B.V.
0 cites
US120338852024
Channeled Lift Pin
ASM IP Holding B.V.
0 cites
US119591752024
Fill on Demand Ampoule Refill
Lam Research Corporation
0 cites
US119461362024
Semiconductor Processing Device
ASM IP Holding B.V.
0 cites
US119087362024
Methods for Depositing a Molybdenum Metal Film Over a Dielectric Surface of a Substrate by a Cyclical Deposition Process and Related Semiconductor Device Structures
ASM IP Holding B.V.
0 cites
US118982422024
Methods for Forming a Polycrystalline Molybdenum Film Over a Surface of a Substrate and Related Structures Including a Polycrystalline Molybdenum Film
ASM IP Holding B.V.
0 cites
US119011752024
Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-deposited Silicon Nitride Layer
ASM IP Holding B.V.
0 cites
US118279782023
Methods for Depositing a Molybdenum Nitride Film on a Surface of a Substrate by a Cyclical Deposition Process and Related Semiconductor Device Structures Including a Molybdenum Nitride Film
ASM IP Holding B.V.
0 cites
US117421982023
Structure Including Siocn Layer and Method of Forming Same
ASM IP Holding B.V.
0 cites
US117274502023
Singularity Recommendation Engine
KYNDRYL, Inc.
0 cites
US115812202023
Methods for Depositing a Molybdenum Metal Film Over a Dielectric Surface of a Substrate by a Cyclical Deposition Process and Related Semiconductor Device Structures
ASM IP Holding B.V.
0 cites