Patents/Inventors

Shang-ying Wu

Hsinchu CountyTW2 patents

3 Patents

US121675252024
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118290822023
Radiation Source for Lithography Process
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118323722023
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites