Patents/Inventors

Shai Mark

Kibutz SnirIL6 patents

7 Patents

US123705812025
In-situ Process Chamber Chuck Cleaning by Cleaning Substrate
KLA Corporation
0 cites
US120092272024
Electrostatic Substrate Cleaning System and Method
KLA Corporation
0 cites
US119087222024
Automatic Teaching of Substrate Handling for Production and Process-control Tools
KLA Corporation
0 cites
US117748662023
Active Reticle Carrier for in Situ Stage Correction
KLA Corporation
0 cites
US116389382023
In Situ Process Chamber Chuck Cleaning by Cleaning Substrate
KLA Corporation
0 cites
US116077162023
Systems and Methods for Chuck Cleaning
KLA Corporation
0 cites
US115691382023
System and Method for Monitoring Parameters of a Semiconductor Factory Automation System
KLA Corporation
0 cites