Patents/Inventors

Shahab Shervin

Norwalk, CTUS3 patents

2 Patents

US125963082026
Modular Wafer Table and Methods of Manufacturing Thereof
ASML Netherlands B.V.
0 cites
US122355922025
Object Holder, Electrostatic Sheet and Method for Making an Electrostatic Sheet
ASML NETHERLANDS B.V.
0 cites