3 Patents
- US123098912025Control Method for Multi-zone Active-matrix Temperature Control in Plasma Processing Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US120946952024Multi-zone Temperature Control Plasma Reactor
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US120464582024Multi-zone Heating Apparatus, Bottom Electrode Assembly, Plasma Processing Apparatus, and Temperature Adjusting Method
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites