6 Patents
- 0 cites
- US125851992026Overlay Correction Method, and Exposure Method and Semiconductor Device Manufacturing Method Including Overlay Correction Method
Samsung Electronics Co., Ltd.
0 cites - US125678972026Reconfigurable Intelligent Surface Forming Multiple Resonances
Samsung Electronics Co., Ltd.
0 cites - US125423602026Laminated Patch Antenna, Antenna Array, and Antenna Package
Samsung Electronics Co., Ltd.
0 cites - US119214212024Overlay Correcting Method, and Photolithography Method, Semiconductor Device Manufacturing Method and Scanner System Based on the Overlay Correcting Method
Samsung Electronics Co., Ltd.
0 cites - US117969232023Overlay Correction Method, Method of Evaluating Overlay Correction Operation, and Method of Fabricating Semiconductor Device Using the Overlay Correction Method
Samsung Electronics Co., Ltd.
0 cites