Patents/Inventors

Seungtae Yang

Yongin-siKR2 patents

4 Patents

US124035082025
Liquid Chemical Supply Module and Substrate Processing Apparatus Including the Same
Semes Co., Ltd.
0 cites
US118697632024
Apparatus and System for Treating Substrate
SEMES CO., Ltd.
0 cites
US118697782024
Liquid Supply Unit, and Apparatus and Method for Processing Substrate
SEMES CO., Ltd.
0 cites
US117942192023
Liquid Supply Unit and Substrate Treating Apparatus and Method
SEMES CO., Ltd.
0 cites