5 Patents
- US124733092025Organometallic Compound and Method of Manufacturing Integrated Circuit Using the Same
ADEKA CORPORATION
0 cites - US124102032025Organometallic Adduct Compound and Method of Manufacturing Integrated Circuit Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US123782722025Yttrium Compound and Method of Manufacturing Integrated Circuit Device by Using the Same
ADEKA CORPORATION
0 cites - 0 cites
- US117281602023Method of Forming Oxide Film Including Two Non-oxygen Elements, Method of Manufacturing Semiconductor Device, Method of Forming Dielectric Film, and Semiconductor Device
Samsung Electronics Co., Ltd.
0 cites