Patents/Inventors

Seungkoo Lee

SeoulKR1 patent

2 Patents

US118289522023
Light Source and Extreme Ultraviolet Light Source System Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116762632023
Extreme Ultraviolet (EUV) Collector Inspection Apparatus and Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites