3 Patents
- US119643572024Conditioner, Chemical Mechanical Polishing Apparatus Including the Same and Method of Manufacturing a Semiconductor Device Using the Apparatus
Samsung Electronics Co., Ltd.
0 cites - US116055512023Chuck Assembly, Semiconductor Device Fabricating Apparatus Including the Same, and Method of Fabricating Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US115906282023Rotary Body Module and Chemical Mechanical Polishing Apparatus Having the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites