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Seshasayee Varadarajan
Lake Oswego, OR
US
9 patents
7 Patents
US12598929
2026
Atomic Layer Etching of Molybdenum
Lam Research Corporation
0 cites
US12588475
2026
High Selectivity Doped Hardmask Films
Lam Research Corporation
0 cites
US12351914
2025
Deposition of Films Using Molybdenum Precursors
Lam Research Corporation
0 cites
US12112980
2024
Method to Create Air Gaps
Lam Research Corporation
0 cites
US11970776
2024
Atomic Layer Deposition of Metal Films
Lam Research Corporation
0 cites
US11637037
2023
Method to Create Air Gaps
Lam Research Corporation
0 cites
US11549175
2023
Method of Depositing Tungsten and Other Metals in 3D NAND Structures
Lam Research Corporation
0 cites