Patents/Inventors

Sergey Voronin

Albany, NYUS11 patents

10 Patents

US125061122025
Method for Etching of Metal
Tokyo Electron Limited
0 cites
US123621582025
Method for OES Data Collection and Endpoint Detection
Tokyo Electron Limited
0 cites
US123060442025
Optical Emission Spectroscopy for Advanced Process Characterization
Tokyo Electron Limited
0 cites
US122875782025
Cyclic Method for Reactive Development of Photoresists
TOKYO ELECTRON LIMITED
0 cites
US121583742024
Time-resolved OES Data Collection
Tokyo Electron Limited
0 cites
US120094302024
Method for Gate Stack Formation and Etching
Tokyo Electron Limited
0 cites
US120026832024
Lateral Etching of Silicon
Tokyo Electron Limited
0 cites
US116997412023
Metal-containing Liner Process
Tokyo Electron Limited
0 cites
US116519702023
Systems and Methods for Selective Ion Mass Segregation in Pulsed Plasma Atomic Layer Etching
Tokyo Electron Limited
0 cites
US116372422023
Methods for Resistive RAM (reram) Performance Stabilization via Dry Etch Clean Treatment
Tokyo Electron Limited
0 cites