Patents/Inventors

Sergei Sokolov

EindhovenNL2 patents

3 Patents

US122875912025
Lithographic Apparatus, Metrology Systems, and Methods Thereof
ASML Netherlands B.V. & ASML Holding N.V.
0 cites
US117623052023
Alignment Method
ASML Netherlands B.V.
0 cites
US117037712023
Variable Diffraction Grating
ASML Netherlands B.V.
0 cites