Patents/Inventors

Sergei G. Bakarian

Mountain View, CAUS3 patents

3 Patents

US125796312026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617902026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617912026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites