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Inventors
Seongjin Hong
Cheongju-si
KR
2 patents
3 Patents
US12272560
2025
Selective Removal of Metal Oxide Hard Masks
ENTEGRIS, Inc.
0 cites
US12152187
2024
Nitride Etchant Composition and Method
ENTEGRIS, Inc.
0 cites
US11697767
2023
Silicon Nitride Etching Composition and Method
ENTEGRIS, Inc.
0 cites